Plasma excitation

TruPlasma RF Series 3000

RF technology without compromises

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Guarantees for excellent process results

With these RF generators you can rest assured the TruPlasma RF Series 3000 stands out for its robust design and high efficiency. This means it is best suited for stable reproducible plasma processes, such as those used during the production of semi-conductors, photovoltaic cells, or flat screens. Installed in thousands of applications around the world, these generators guarantee a high level of productivity and excellent process results.

Efficiency and cost-effectiveness

Efficiency of up to 80% enables energy costs to be decreased by up to 50%.

Excellent RF arc management

Safe operation, even of demanding and new processes.

Extremely robust and high process stability

CombineLine technology: Reliable protection against reflected power in the event of mismatch.

Maximum flexibility

Continuous or pulsed power output results in diverse applications.

This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.

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