TruPlasma Bipolar 4040 bipolar generator

Plasma excitation

TRUMPF Hüttinger

TruPlasma Bipolar Series 4000 (G2)

Maximum power on a flexible wave

Overview

Applications

Technical Data

Customer benefits

Software

System components

Bipolar technology for the most demanding requirements

The process power supplies from the TruPlasma Bipolar Series 4000 (G2) were specially developed for plasma-based coating by means of physical vapor deposition (PVD), plasma-enhanced chemical vapor deposition (PECVD), and reactive sputtering processes. As a result of their configurable output signal and sophisticated ARC management, these latest generation, bipolar pulsers are extremely versatile. Regardless of whether the application is semi-conductor and solar cell manufacturing, or coating architectural glazing, you can always expect maximum performance in terms of coating quality and rates.

Extremely low ARC energy

Fully digital arc management for the highest coating quality and productivity.

Configurable wave forms

Simple adjustment to various processes by varying the output signal.

One generator, numerous applications

DC, pulsed DC and bipolar: Save on costs due to diverse settings.

Integrated water cooling

No external components are required, meaning it only requires a small amount of space.

Typical area of application of the TruPlasma Bipolar Series 4000 (G2): Manufacture of wear-resistant layers

First-rate power supply

Typical areas of application include semi-conductor and photovoltaics production, coating architectural glazing, and manufacturing decorative and wear-resistant coatings of the highest quality. PVD and PECVD processes, in particular, are used for this.

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TruPlasma Bipolar 4010 (G2)
TruPlasma Bipolar 4020 (G2)
TruPlasma Bipolar 4030 (G2)
TruPlasma Bipolar 4040 (G2)
TruPlasma Bipolar 4060 (G2)

	TruPlasma Bipolar 4010 (G2) Compare product	TruPlasma Bipolar 4020 (G2) Compare product	TruPlasma Bipolar 4030 (G2) Compare product	TruPlasma Bipolar 4040 (G2) Compare product	TruPlasma Bipolar 4060 (G2) Compare product
Output
Rated output	10 kW	20 kW	30 kW	40 kW	60 kW
Maximum output current	25 A eff	50 A eff	75 A eff	100 A eff	150 A eff
Maximum output voltage	1000 V eff	1000 V eff	1000 V eff	1000 V eff	1000 V eff
Nominal operating frequency	20 kHz - 80 kHz	20 kHz - 80 kHz	20 kHz - 80 kHz	20 kHz - 80 kHz	20 kHz - 80 kHz
Arc parameter
Maximum arc rate	20000 1/s	20000 1/s	20000 1/s	20000 1/s	20000 1/s
Arc energy	0.3 mJ/kW	0.3 mJ/kW	0.3 mJ/kW	0.3 mJ/kW	0.3 mJ/kW
Ignition voltage
with auxiliary ignition	2000 V	2000 V	2000 V	2000 V	2000 V
Network connection data
Line voltage	380 480 V	380 480 V	380 480 V	380 480 V	380 480 V
Line frequency	50 Hz - 60 Hz	50 Hz - 60 Hz	50 Hz - 60 Hz	50 Hz - 60 Hz	50 Hz - 60 Hz
Power factor	0.95	0.95	0.95	0.95	0.95
Communication interfaces
Analog/digital	Yes	Yes	Yes	Yes	Yes
RS 232 / RS 485	Yes	Yes	Yes	Yes	Yes
PROFIBUS	Yes	Yes	Yes	Yes	Yes
EtherCAT	Yes	Yes	Yes -	Yes	Yes
DeviceNet	Yes	Yes	Yes -	Yes	Yes
Housing
Width	482 mm	482 mm	482 mm	482 mm	482 mm
Height	178 mm	266 mm	355 mm	355 mm	622 mm
Depth	683 mm	683 mm	683 mm	683 mm	683 mm
Weight	60 kg	60 kg	100 kg	100 kg	160 kg
IP protection class	IP40	IP40	IP40	IP40	IP40
Cooling requirements
Coolant	Water	Water	Water	Water	Water
Max. water pressure	7 bar	7 bar	7 bar	7 bar	7 bar
Min. pressure differential	3 bar	3 bar	3 bar	3 bar	3 bar
Min. flow rate	4 l/min	8 l/min	8 l/min	12 l/min	12 l/min
Coolant temperature	20 °C - 35 °C	20 °C - 35 °C	20 °C - 35 °C	20 °C - 35 °C	20 °C - 35 °C
General
Overall efficiency	90 %	90 %	90 %	90 %	90 %
Ambient conditions
Outside temperature	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C
Humidity	5 % - 85 %	5 % - 85 %	5 % - 85 %	5 % - 85 %	5 % - 85 %
Barometric pressure	86 kPa - 106 kPa	86 kPa - 106 kPa	86 kPa - 106 kPa	86 kPa - 106 kPa	86 kPa - 106 kPa

Compare products End comparison End comparison	TruPlasma Bipolar 4010 (G2)	TruPlasma Bipolar 4020 (G2)	TruPlasma Bipolar 4030 (G2)	TruPlasma Bipolar 4040 (G2)	TruPlasma Bipolar 4060 (G2)
Output
Rated output	10 kW	20 kW	30 kW	40 kW	60 kW
Maximum output current	25 A eff	50 A eff	75 A eff	100 A eff	150 A eff
Maximum output voltage	1000 V eff	1000 V eff	1000 V eff	1000 V eff	1000 V eff
Nominal operating frequency	20 kHz - 80 kHz	20 kHz - 80 kHz	20 kHz - 80 kHz	20 kHz - 80 kHz	20 kHz - 80 kHz
Arc parameter
Maximum arc rate	20000 1/s	20000 1/s	20000 1/s	20000 1/s	20000 1/s
Arc energy	0.3 mJ/kW	0.3 mJ/kW	0.3 mJ/kW	0.3 mJ/kW	0.3 mJ/kW
Ignition voltage
with auxiliary ignition	2000 V	2000 V	2000 V	2000 V	2000 V
Network connection data
Line voltage	380 480 V	380 480 V	380 480 V	380 480 V	380 480 V
Line frequency	50 Hz - 60 Hz	50 Hz - 60 Hz	50 Hz - 60 Hz	50 Hz - 60 Hz	50 Hz - 60 Hz
Power factor	0.95	0.95	0.95	0.95	0.95
Communication interfaces
Analog/digital	Yes	Yes	Yes	Yes	Yes
RS 232 / RS 485	Yes	Yes	Yes	Yes	Yes
PROFIBUS	Yes	Yes	Yes	Yes	Yes
EtherCAT	Yes	Yes	Yes -	Yes	Yes
DeviceNet	Yes	Yes	Yes -	Yes	Yes
Housing
Width	482 mm	482 mm	482 mm	482 mm	482 mm
Height	178 mm	266 mm	355 mm	355 mm	622 mm
Depth	683 mm	683 mm	683 mm	683 mm	683 mm
Weight	60 kg	60 kg	100 kg	100 kg	160 kg
IP protection class	IP40	IP40	IP40	IP40	IP40
Cooling requirements
Coolant	Water	Water	Water	Water	Water
Max. water pressure	7 bar	7 bar	7 bar	7 bar	7 bar
Min. pressure differential	3 bar	3 bar	3 bar	3 bar	3 bar
Min. flow rate	4 l/min	8 l/min	8 l/min	12 l/min	12 l/min
Coolant temperature	20 °C - 35 °C	20 °C - 35 °C	20 °C - 35 °C	20 °C - 35 °C	20 °C - 35 °C
General
Overall efficiency	90 %	90 %	90 %	90 %	90 %
Ambient conditions
Outside temperature	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C
Humidity	5 % - 85 %	5 % - 85 %	5 % - 85 %	5 % - 85 %	5 % - 85 %
Barometric pressure	86 kPa - 106 kPa	86 kPa - 106 kPa	86 kPa - 106 kPa	86 kPa - 106 kPa	86 kPa - 106 kPa

PDF <1MB

Technical data sheet

The technical data of all product versions as a download.

Perfect coatings, high productivity

Completely digital arc management with very low arc energy ensures high coating quality and deposition rates. Even in demanding reactive processes, the TruPlasma Bipolar Series 4000 (G2) always guarantees a uniform process power supply and thus a stable plasma condition.

Multiple applications due to flexible selection of the output signal

More flexibility, lower costs

Adjustable wave forms mean that you can very easily adjust the TruPlasma Bipolar Series 4000 (G2) generators to suit a variety of process requirements. With the flexible selection of the output signal (DC, pulsed DC or bipolar), they can be used with versatility, thereby helping to reduce your total cost of ownership (TCO).

TruPlasma Bipolar 4060 bipolar generator

Everything in a single housing

No external components are needed due to the water cooling which is fully integrated in the environmentally-protected generator housing.

PVD Power

The user-friendly, multilingual PVD Power software offers you numerous operation, configuration, and diagnosis options for optimizing process quality and effective error correction. Display actual values for all relevant process parameters as well as warnings and alarms, specification of target values by the operator, as well as recording and visualization of important operating parameters with high temporal resolution (oscilloscope function).

By selecting from a variety of system components, you can optimally adjust your bipolar pulse generator to your system environment.

Rear view of a generator from the TruPlasma Bipolar Series 4000 (G2)

Mains cable

Various cable and connector designs are available for different connection standards.

This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.

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Your contact at TRUMPF Hüttinger

Are you interested in a product or do you need a consultation? Here you can find your contact persons - worldwide.

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Service & contact

Contact

Ehab Alhawari

Sales TRUMPF Hüttinger

Phone +49 761 89712115

Services

Downloads

TruPlasma Bipolar Series 4000 (G2) brochure

pdf - 1 MB

Whitepaper Shape matters - Bipolar sputtering

pdf - 683 KB

Whitepaper sine or square wave

pdf - 942 KB